Plasma Process & Equipment Engineer (m/f/d)

Job Overview

We are looking for a highly motivated Process & Equipment Engineer (m/f/d) specializing in Plasma Processing to support and optimize semiconductor manufacturing operations. This role focuses on plasma-based deposition, etch, and ashing technologies, including PECVD, RIE, IBE, and Etch systems. You will be responsible for process development, tool qualification, and continuous improvement of plasma processes to ensure stable manufacturing performance, high yield, and cost-effective production.

You will collaborate closely with cross-functional teams (R&D, maintenance, production, quality teams) and external equipment suppliers to maintain process stability, implement new technologies, and drive operational excellence in a high-volume fab environment.

Job Requirements

Process Development & Optimization: 

• Develop, characterize, and optimize plasma-based semiconductor processes such as PECVD deposition, reactive ion etching (RIE), ion beam etching (IBE), and plasma ashing systems
• Define and refine process windows and plasma parameters (RF power, pressure, gas chemistry, bias voltage, temperature) using Design of Experiments (DOE) and statistical analysis
• Investigate yield excursions, plasma-induced defects, and process deviations through systematic root cause analysis.
• Establish and maintain process control strategies including monitoring of film thickness, etch rate, uniformity, selectivity, defect density, and plasma stability
• Support development and transfer of new plasma recipes and technology nodes from R&D to high-volume manufacturing

 Equipment Engineering:

• Lead equipment selection, specification, and installation for new tools and technology upgrades
• Drive tool qualification (IQ/OQ/PQ) and process-tool matching across fleet
• Monitor and improve equipment uptime, MTBF and throughput using TPM methods
• Interface with equipment vendors for troubleshooting, upgrades, and preventive maintenance optimization

Data Analysis & Continuous Improvement:

• Analyze large datasets from inline metrology tools (e.g., CD-SEM, ellipsometry, profilometry, plasma diagnostics) and electrical test results to identify trends and prevent process drift
• Develop or support automation scripts, monitoring dashboards, and data visualization tools for real-time tracking of process and equipment performance
• Participate in FMEA, risk assessments, and change management activities for new process introduction and equipment modifications
• Drive continuous improvement initiatives focused on cycle time reduction, plasma consumable optimization, and cost-of-poor-quality (CoPQ) reduction

Collaboration & Documentation: 

• Provide technical support for production teams on process and equipment issues
• Collaborate with global engineering teams for technology transfer and benchmarking
• Document process recipes, work instructions, specifications, and change controls in compliance with quality standards (e.g. ISO9000, IATF)

What your background should look like

• Master’s or Bachelor’s degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, Chemical Engineering, or a related field
• 3-5 years of experience in semiconductor process or equipment engineering in a manufacturing fab (preferred; entry‑level candidates with relevant internships will also be considered)
• Solid understanding of semiconductor single‑unit processes, tool hardware, vacuum systems, RF plasma, thermal processes, or chemical reactions
• Strong analytical and problem‑solving skills; proficiency with data analysis tools and programming languages is a plus (e.g., JMP, R, Python, MATLAB, etc.)
• Fluency in English and conversational German skills required

Competencies